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Optimization of STEM Moiré analysis for Two-Dimensional Strain Characterization

Published online by Cambridge University Press:  30 July 2021

Mu-Tung Chang ,
Ren-Fong Cai ,
ShihYi Liu  and
Shen-Chuan Lo
Mu-Tung Chang
Affiliation:
Material and Chemical Research Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan, Hsinchu, Taiwan (Republic of China)
Ren-Fong Cai
Affiliation:
Material and Chemical Research Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan, United States
ShihYi Liu
Affiliation:
Material and Chemical Research Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan, United States
Shen-Chuan Lo
Affiliation:
Material and Chemical Research Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan, United States

Abstract

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Type
Diffraction Imaging Across Disciplines
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1530 - 1533
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Ishizuka, Akimitsu, Hytch, Martin, Ishizuka, Kazuo, “STEM moiré analysis for 2D strain measurements”, Microscopy, Volume 66, Issue 3, June 2017, Pages 217–221CrossRefGoogle ScholarPubMed