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Optimization of the Shapes of Electrodes of Electrostatic Lenses
Published online by Cambridge University Press: 28 September 2015
Abstract
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We explore the benefits of using novel electrode shapes in electrostatic lenses. Two representative types of lenses are considered and significant improvements are obtained in their spherical aberrations.
- Type
- Numerical Methods
- Information
- Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 276 - 279
- Copyright
- Copyright © Microscopy Society of America 2015
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