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Optimized Sample Preparation for the Imaging of Silicon Defects using Plan View Transmission Electron Microscopy

Published online by Cambridge University Press:  26 July 2009

N Wang ,
A Myers ,
M Sidorov ,
H Koo ,
C Yuan ,
B Tracy  and
S Li
N Wang
Affiliation:
Maxim
A Myers
Affiliation:
Spansion
M Sidorov
Affiliation:
Spansion
H Koo
Affiliation:
Spansion
C Yuan
Affiliation:
Altera
B Tracy
Affiliation:
Spansion
S Li
Affiliation:
Spansion

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 360 - 361
Copyright
Copyright © Microscopy Society of America 2009