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Phase Behaviors of AlN Layers Grown on Si(111) Substrate by Metalorganic Chemical Vapor Deposition: A Transmission Electron Microscopy Study

Published online by Cambridge University Press:  23 November 2012

Y. Kim  and
S. Ahn
Y. Kim
Affiliation:
Korea Research Institute of Standards and Science, Daejeon, Republic of Korea
S. Ahn
Affiliation:
Korea Research Institute of Standards and Science, Daejeon, Republic of Korea
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1636 - 1637
Copyright
Copyright © Microscopy Society of America 2012

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