Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope

J Chuah; D Holburn

doi:10.1017/S1431927611006933

Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope

Published online by Cambridge University Press: 09 April 2017

J Chuah and

D Holburn

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J Chuah: Affiliation:
University of Cambridge, United Kingdom
D Holburn: Affiliation:
University of Malaya, Malaysia

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type: Abstract
Information: Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1212 - 1213

DOI: https://doi.org/10.1017/S1431927611006933 [Opens in a new window]

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Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope

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