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Point Defects and Alloy Incorporation in Ultrawide Bandgap β-(AlxGa1-x)2O3 Films

Published online by Cambridge University Press:  30 July 2021

Hsien-Lien Huang ,
Jared Johnson ,
Chris Chae ,
A F M Anhar Uddin Bhuiyan ,
Zixuan Feng ,
Nidhin Kurian Kalarickal ,
Siddharth Rajan ,
Hongping Zhao  and
Jinwoo Hwang
Hsien-Lien Huang
Affiliation:
Materials Science and Engineering, The Ohio State University, United States
Jared Johnson
Affiliation:
Materials Science and Engineering, The Ohio State University, United States
Chris Chae
Affiliation:
Materials Science and Engineering, The Ohio State University, United States
A F M Anhar Uddin Bhuiyan
Affiliation:
Electrical and Computer Engineering, The Ohio State University, United States
Zixuan Feng
Affiliation:
Electrical and Computer Engineering, The Ohio State University, United States
Nidhin Kurian Kalarickal
Affiliation:
Electrical and Computer Engineering, The Ohio State University, United States
Siddharth Rajan
Affiliation:
Electrical and Computer Engineering, The Ohio State University, United States
Hongping Zhao
Affiliation:
Electrical and Computer Engineering, The Ohio State University, United States
Jinwoo Hwang
Affiliation:
Materials Science and Engineering, The Ohio State University, United States

Abstract

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Type
Defects in Materials: How We See and Understand Them
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2140 - 2142
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Wong, M. H. et al. , IEEE Electron Device Lett. 37, 212 (2016).CrossRefGoogle Scholar
Johnson, J. M. et al. , Phys. Rev. X 9, 041027 (2019).Google Scholar
Johnson, J. M. et al. , submitted.Google Scholar
Peelaers, H. et al. , Appl. Phys. Lett. 112, 242101 (2018).CrossRefGoogle Scholar
This work was support by the Department of Defense, Air Force Office of Scientific Research GAME MURI Program (Grant No. FA9550-18-1-0479).Google Scholar