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Possible Approaches for Combined Use of Xenon and Gallium Ion Sources for Task Specific Focused Ion Beam Sample Preparation

Published online by Cambridge University Press:  22 July 2022

Ladislav Klimša ,
Jan Duchoň ,
Petr Svora  and
Jaromír Kopeček
Ladislav Klimša*
Affiliation:
FZU – Institute of Physics of the Czech Academy of Sciences, Department of Material Analysis, Prague, Czech Republic
Jan Duchoň
Affiliation:
FZU – Institute of Physics of the Czech Academy of Sciences, Department of Material Analysis, Prague, Czech Republic
Petr Svora
Affiliation:
FZU – Institute of Physics of the Czech Academy of Sciences, Department of Material Analysis, Prague, Czech Republic
Jaromír Kopeček
Affiliation:
FZU – Institute of Physics of the Czech Academy of Sciences, Department of Material Analysis, Prague, Czech Republic
*
*Corresponding author: klimsa@fzu.cz

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 26 - 27
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Copyright
Copyright © Microscopy Society of America 2022

References

Stevie, F A in “Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice”, ed. Giannuzzi, L A, (Springer Science+Business Media, Inc., New York) p. 3.Google Scholar
Giannuzzi, L A in “Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice”, ed. Giannuzzi, L A, (Springer Science+Business Media, Inc., New York) p. 50.CrossRefGoogle Scholar
CzechNanoLab project LM2018110 funded by MEYS CR is gratefully acknowledged for the financial support of measurements at the LNSM Research Infrastructure.Google Scholar