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Precise Ion Milling and 3D TEM technique to Deal with Feature Blocking in TEM Viewing Semiconductor Devices

Published online by Cambridge University Press:  31 July 2006

N Wang ,
W Gruenewald  and
S Miller
N Wang
Affiliation:
W Gruenewald
Affiliation:
BAL-TEC Innovations
S Miller
Affiliation:
Cypress Semiconductor

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1240 - 1241
Copyright
© 2006 Microscopy Society of America