Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-30T00:40:29.691Z Has data issue: false hasContentIssue false
  • English
  • Français

Probe Optimization studies For High current Focused Ion Beam Instruments

Published online by Cambridge University Press:  23 September 2015

Srinivas Subramaniam ,
John Richards  and
Kevin Johnson
Srinivas Subramaniam
Affiliation:
Intel Corporation, Hillsboro, USA.
John Richards
Affiliation:
Intel Corporation, Hillsboro, USA.
Kevin Johnson
Affiliation:
Intel Corporation, Hillsboro, USA.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1841 - 1842
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Subramaniam, Srinivas & Johnson, Kevin, Microsc. And Microanal. 20(S3 (2014) 296.Google Scholar
[2] Shida, Tan, Livengood, Richard, Greenzweig, Yuval, Drezner, Yariv & Shima, Darryl, J.Vac.Sci.Technol. B B 30 (2012) 06F606-1.Google Scholar
[3] Ben Assayag, G, Vieu, C, Gieerak, J., Sudraud, P. & Corbin, A., J.Vac. Sci.Technol B11(6, (1993).Google Scholar