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Probing Threading Dislocations in a Micrometer-Thick GaN Film by High-Voltage Scanning Transmission Electron Microscopy

Published online by Cambridge University Press:  05 August 2019

Kazuhisa Sato  and
Hidehiro Yasuda
Kazuhisa Sato*
Affiliation:
Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, Ibaraki, Japan
Hidehiro Yasuda
Affiliation:
Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, Ibaraki, Japan
*
*Corresponding author: sato@uhvem.osaka-u.ac.jp

Abstract

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Type
Microscopy and Microanalysis for Real-World Problem Solving
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 842 - 843
Copyright
Copyright © Microscopy Society of America 2019 

References

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[3]Sato, K. et al. Mater. Trans. 57 (2016), 918.Google Scholar
[4]Sato, K., Yamashita, Y., Yasuda, H., and Mori, H., Jpn. J. Appl. Phys. 56 (2017), p.100304.Google Scholar
[5]Sato, K. and Ysauda, H., ACS Omega 3 (2018), p.13524.Google Scholar
[6]The authors wish to thank Mr. A. Ohsaki, Mr. Y. Agatsuma, Mr. S. Takakuwa, Dr. S. Ohta, and Mr. M. Ohsaki of JEOL Ltd. for their support using the JEM-1000EES. KS acknowledges Professor Emeritus H. Mori of Osaka University for his invaluable comments. This study was partially supported by JSPS KAKENHI Grant Number JP17H02746.Google Scholar