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Resolution Achievement of 40.5 pm in Scanning Transmission Electron Microscopy using 300 kV Microscope with Delta Corrector

Published online by Cambridge University Press:  01 August 2018

Shigeyuki Morishita ,
Ryo Ishikawa ,
Yuji Kohno ,
Hidetaka Sawada ,
Naoya Shibata  and
Yuichi Ikuhara
Shigeyuki Morishita
Affiliation:
JEOL Ltd, Akishima, Tokyo, Japan.
Ryo Ishikawa
Affiliation:
Institute of Engineering Innovation, The University of Tokyo, Bunkyo-ku, Tokyo, Japan.
Yuji Kohno
Affiliation:
JEOL Ltd, Akishima, Tokyo, Japan.
Hidetaka Sawada
Affiliation:
JEOL Ltd, Akishima, Tokyo, Japan.
Naoya Shibata
Affiliation:
Institute of Engineering Innovation, The University of Tokyo, Bunkyo-ku, Tokyo, Japan.
Yuichi Ikuhara
Affiliation:
Institute of Engineering Innovation, The University of Tokyo, Bunkyo-ku, Tokyo, Japan.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 120 - 121
Copyright
© Microscopy Society of America 2018 

References

[1] Sawada, H, et al, Microscopy 64 2015) p 213.Google Scholar
[2] Akashi, T, et al, Appl. Phys. Lett. 106 2015) p 074101.Google Scholar
[3] Sawada, H, et al, J. Electron Microsc. 58 2009) p 341.Google Scholar
[4] Morishita, S, et al, Microscopy 2018.Google Scholar
[5] Morishita, S, et al, Microscopy 67 2017) p 46.Google Scholar