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The SEM/FIB Workbench: Nanorobotics System Inside of Scanning Electron or Focused Ion Beam Microscopes

Published online by Cambridge University Press:  01 August 2010

V Klocke  and
B Plitzko
V Klocke
Affiliation:
Klocke Nanotechnik Gmbh, Germany
B Plitzko
Affiliation:
Klocke Nanotechnik Gmbh, Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 1770 - 1771
Copyright
Copyright © Microscopy Society of America 2010