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The SEM/FIB Workbench: Nanorobotics System Inside of Scanning Electron or Focussed Ion Beam Microscopes

Published online by Cambridge University Press:  08 April 2017

V Klocke ,
I Burkart  and
R Kaufmann
V Klocke
Affiliation:
Klocke Nanotechnik GmbH
I Burkart
Affiliation:
Klocke Nanotechnik GmbH
R Kaufmann
Affiliation:
Klocke Nanotechnik GmbH

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 518 - 519
Copyright
Copyright © Microscopy Society of America 2011