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Superior Imaging Quality of Scanning Helium-Ion Microscopy: a Look at Beam-Sample Interactions,

Published online by Cambridge University Press:  26 July 2009

D Cohen-Tanugi  and
N Yao
D Cohen-Tanugi
Affiliation:
Princeton University
N Yao
Affiliation:
Princeton University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 656 - 657
Copyright
Copyright © Microscopy Society of America 2009