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A TEM Nanoanalytic Investigation of Pd/Ge Ohmic Contacts for the Miniaturization and Optimization of InGaAs nMOSFET Devices.

Published online by Cambridge University Press:  26 July 2009

P Longo ,
W Jansen ,
C Merckling ,
J Penaud ,
M Caymax ,
IG Thayne  and
AJ Craven
P Longo
Affiliation:
University of Glasgow,United Kingdom
W Jansen
Affiliation:
University of Glasgow,United Kingdom
C Merckling
Affiliation:
IMEC,Belgium
J Penaud
Affiliation:
Riber,France
M Caymax
Affiliation:
IMEC,Belgium
IG Thayne
Affiliation:
University of Glasgow,United Kingdom
AJ Craven
Affiliation:
University of Glasgow,United Kingdom

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 1212 - 1213
Copyright
Copyright © Microscopy Society of America 2009