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TEM Specimen Preparation for Integrated Circuits - Challenges and Solutions

Published online by Cambridge University Press:  06 August 2003

Youren Xu  and
Chris Schwappach
Youren Xu
Affiliation:
Intel Corporation, New Mexico Materials Lab, 4100 Sara Road, Rio Rancho, NM 87124
Chris Schwappach
Affiliation:
Intel Corporation, New Mexico Materials Lab, 4100 Sara Road, Rio Rancho, NM 87124

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 154 - 155
Copyright
Copyright © Microscopy Society of America 2003