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Ultra-High Resolution Imaging and Metrology with Low Vacuum SEM

Published online by Cambridge University Press:  01 August 2005

B L Thiel ,
M Toth  and
W R Knowles
B L Thiel
Affiliation:
University at Albany, New York
M Toth
Affiliation:
FEI Company, Peabody, Massachusetts
W R Knowles
Affiliation:
FEI Company, Peabody, Massachusetts

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 384 - 385
Copyright
© 2005 Microscopy Society of America