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Uncovering the Mechanism for Electron-beam Manipulation of Dopants in Silicon

Published online by Cambridge University Press:  30 July 2020

Alexander Markevich ,
Bethany Hudak ,
Andrew Lupini  and
Toma Susi
Alexander Markevich
Affiliation:
University of Vienna, Vienna, Wien, Austria
Bethany Hudak
Affiliation:
US Naval Research Laboratory, Washington, District of Columbia, United States
Andrew Lupini
Affiliation:
ORNL, Knoxville, Tennessee, United States
Toma Susi
Affiliation:
University of Vienna, Vienna, Wien, Austria

Abstract

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Type
Advances in Microscopy for Quantum Information Sciences - Single Atom
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2560 - 2561
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Copyright
Copyright © Microscopy Society of America 2020

References

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