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The use of Au and Pt x-ray N lines for correct EDX analysis of C in gold and platinum depositions of micro and nano structures

Published online by Cambridge University Press:  26 July 2009

JJL Mulders
Affiliation:
FEI Electron Optics,Netherlands
A Botman
Affiliation:
Delft University of Technology,Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2009