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Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope
Published online by Cambridge University Press: 28 September 2015
Abstract
A wave optical calculation of the probe size of a low energy scanning electron microscope is presented. The resolution for the optimal aperture was computed and compared with results of standard approaches. The effect of deflection aberrations is also considered, and it was found to be critical for the landing energies below 5eV and fields of view larger than 100 x 100 μm2.
- Type
- Numerical Methods
- Information
- Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 212 - 217
- Copyright
- Copyright © Microscopy Society of America 2015
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