Hostname: page-component-77c89778f8-vpsfw Total loading time: 0 Render date: 2024-07-18T09:32:55.818Z Has data issue: false hasContentIssue false
  • English
  • Français

Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope

Published online by Cambridge University Press:  28 September 2015

Tomáš Radlička
Tomáš Radlička*
Affiliation:
Institute Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic

Abstract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

A wave optical calculation of the probe size of a low energy scanning electron microscope is presented. The resolution for the optimal aperture was computed and compared with results of standard approaches. The effect of deflection aberrations is also considered, and it was found to be critical for the landing energies below 5eV and fields of view larger than 100 x 100 μm2.

Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 212 - 217
Copyright
Copyright © Microscopy Society of America 2015 

References

[1]Barth, J & Kruit, P, Optik 101 (1996), p. 101.Google Scholar
[2]Hawkes, PW & Kasper, E in "Principles of electron optics, Vol. 3", Academic Press, London),1994.Google Scholar
[3]Haider, M, Uleman, S & Zach, J, Ultramicroscopy 81 (2000), p. 163.CrossRefGoogle Scholar
[4]Krivanek, OL, et al in "Handbook of Charged Particle Optics", (CRC Press, Boca Raton), p. 601.Google Scholar
[5]Berz, M, Adv. Imaging Electron Phys. 108 (1999).Google Scholar
[6]Wang, L, et al, Microelectron. Eng. 73–74 (2004), p. 90.CrossRefGoogle Scholar
[7]Radlicka, T & Lencovä, B, Ultramicroscopy 110 (2010), p. 1198.CrossRefGoogle Scholar
[8]Goto, E & Soma, T, Optik 48 (1977), p. 255.Google Scholar
[9]Kang, Y, et al, Optik 120 (2009), p. 591.CrossRefGoogle Scholar
[10] The author acknowledges the support from Ministry of Education, Youth and Sports of the Czech Republic (LO1212 and 7H13015) and the European Commission (ALISI No. CZ.1.05/2.1.00/01.0017 and E450EDL, No. 325613).Google Scholar