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Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope

Published online by Cambridge University Press:  28 September 2015

Tomáš Radlička*
Affiliation:
Institute Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 612 64 Brno, Czech Republic

Abstract

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A wave optical calculation of the probe size of a low energy scanning electron microscope is presented. The resolution for the optimal aperture was computed and compared with results of standard approaches. The effect of deflection aberrations is also considered, and it was found to be critical for the landing energies below 5eV and fields of view larger than 100 x 100 μm2.

Type
Numerical Methods
Copyright
Copyright © Microscopy Society of America 2015 

References

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