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XAS and TEM Study of the TiN Thin Films Grown by the Pulsed DC Sputtering Technique Assisted by Balanced Magnetron.
Published online by Cambridge University Press: 31 July 2006
Extract
Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006
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- © 2006 Microscopy Society of America