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X-Ray Microanalysis with High Spatial Resolution and High Counts Rate with a State of the Art Field Emission Scanning Electron Microscope

Published online by Cambridge University Press:  27 August 2014

Raynald Gauvin ,
Nicolas Brodusch ,
Hendrix Demers  and
Patrick Woo
Raynald Gauvin
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada
Nicolas Brodusch
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada
Hendrix Demers
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada
Patrick Woo
Affiliation:
Hitachi High-Technologies Canada Inc., Toronto, Canada

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 650 - 651
Copyright
Copyright © Microscopy Society of America 2014 

References

Reference:

[1] Newbury, D.E., Ritchie, N.W.M. Scanning, 33 ( (2011), pp. 174-192.Google Scholar
[2] Joy, D.C. Journal of Microscopy, 208 (2002), pp. 24-34.Google Scholar
[3] Kim, J., et al, Journal of Vacuum Science Technology B, 25 (2007), pp. 1771-1775.Google Scholar