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X-ray Sources for High Throughput and Extreme Resolution Imaging

Published online by Cambridge University Press:  10 August 2018

Fei Yang ,
Julius Hallstedt ,
Ulf Lundstrom ,
Mikael Otendal ,
Tomi Tuohimaa ,
Daniel Larsson  and
Anasuya Adibhatla
Fei Yang*
Affiliation:
Excillum AB, Torshamnsgatan 35, Sweden
Julius Hallstedt
Affiliation:
Excillum AB, Torshamnsgatan 35, Sweden
Ulf Lundstrom
Affiliation:
Excillum AB, Torshamnsgatan 35, Sweden
Mikael Otendal
Affiliation:
Excillum AB, Torshamnsgatan 35, Sweden
Tomi Tuohimaa
Affiliation:
Excillum AB, Torshamnsgatan 35, Sweden
Daniel Larsson
Affiliation:
Excillum AB, Torshamnsgatan 35, Sweden
Anasuya Adibhatla
Affiliation:
Excillum Inc, Grafton, MA, USA
*
* e-mail: fei.yang@excillum.com.

Abstract

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Keywords

NanofocusMicrofocusX-ray tubeComputed TomographyMetalJet
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S2: Proceedings of the 14th International Conference on X-ray Microscopy (XRM2018) , August 2018 , pp. 314 - 315
Copyright
© Microscopy Society of America 2018 

References

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[6] Rudati, J. Rapid integrated circuit inspection for reliability and security inspection, International Conference X-ray Microscopy, Oxford, 2016.Google Scholar