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X-ray Spectrometry in the Era of Aberration-Corrected Electron Optical Beam Lines

Published online by Cambridge University Press:  10 May 2022

Nestor J. Zaluzec Open the ORCID record for Nestor J. Zaluzec [Opens in a new window]
Nestor J. Zaluzec*
Affiliation:
Photon Sciences Directorate, Argonne National Laboratory, Lemont, IL, USA
*
Email: zaluzec@microscopy.com
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Abstract

Aberration correction in the analytical transmission electron microscope is most closely associated with improvements in high-resolution imaging. In this paper, the combination of that technology with new system designs, which optimize both electron optics and x-ray detection, is shown to provide more than a tenfold increase in performance over the last 25 years.

Keywords

aberration correctionAEMEELSTEM/STEMXEDS
Type
Original Article
Information
Microscopy and Microanalysis , First View , pp. 1 - 7
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Copyright
Copyright © The Author(s), 2022. Published by Cambridge University Press on behalf of the Microscopy Society of America

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