This special issue of Microscopy and Microanalysis explores quantitative electron diffraction from nonbiological materials. Jim Turner and I have put many hours of work into bringing it together, and we thank the authors for their fine contributions. The articles cover a wide range of materials and techniques, from convergent-beam electron diffraction (CBED) to the new Kohler SAD mode, as well as the use of direct methods, the study of diffuse elastic scattering from defects, strain measurement, and multiwavelength methods. We were sorry that we could not obtain recent work using the precession electron diffraction camera by our deadline, but readers should be aware of that promising method also.

Accurate low-order structure factors for copper metal have been measured by quantitative convergent beam electron diffraction (QCBED). The standard deviation of the measured structure factors is equal to or smaller than the most accurate measurement by any other method, including X-ray single crystal Pendellösung, Bragg γ-ray diffraction, and high-energy electron diffraction. The electron structure factor for the (440) reflection was used to determine the Debye-Waller (DW) factor. The local heating of the specimen by the electron beam is determined to be 5 K under the current illumination conditions. The low-order structure factors for copper measured by different methods are compared and discussed. The new data set is used to test band theory and to obtain a charge density map. The charge deformation map shows a charge surplus between the atoms and agrees fairly well with the simple model of copper 2+ ions at the atomic sites in a sea of free uniformly distributed electrons.

Energy filtered convergent beam electron diffraction was used to investigate localized strain in aluminum interconnects. By analyzing the position of higher order Laue zone lines, it is possible to measure the three-dimensional lattice strain with high accuracy (∼10−4) and high spatial resolution (10 to 100 nm). In the present article, important details of the strain analysis procedure are outlined. Subsequently, results of measurements of the local variation of thermal strains in narrow, free-standing interconnects are presented. The strain development in single grains during thermal cycling between −170°C and +100°C was measured in situ and local stress variations along the interconnect were investigated. The interconnects show reversible elastic behavior over the whole temperature range, leading to large stresses at low temperatures. The strain state varies locally within single grains, as well as from grain to grain, by as much as 50% in both types of samples. By comparing the experimental findings with elastic finite element modeling, a detailed understanding of the triaxial strain state could be achieved.

We investigate cases where one can argue that sufficient conditions exist for Direct Methods to work with swift electrons. In addition to simple cases where kinematical scattering holds (e.g., surfaces in plan view), we identify three other configurations: (a) when 1s channeling holds and kinematical scattering is statistically correct; (b) when there is a mapping from kinematical to dynamical intensities that preserves the order of the intensities, for instance with powder or precession data, and (c) when the scattering is dominated by one type of atom. We also briefly discuss the possibility of using Direct Methods to restore the complex exit wave leaving a sample in the most general case.

Quantitative zone-axis convergent beam electron diffraction (CBED) is now an established technique. Over the past decade it has been developed into a tested method for the accurate refinement of structure factors, allowing the details of the charge density and bonding effects to be studied in crystalline materials. Strategies for obtaining the most accurate results have evolved, and the most important influences on the accuracy have been determined. Initial applications of the technique to bond charge density determination have led to the extension of the method to the refinement of other important parameters influencing the experimental data, such as Debye–Waller factors and the absorption potential. The development and current status of quantitative zone-axis CBED are discussed. Prospects for the future development and application of the technique are also considered.

Current X-ray diffraction techniques intended for “ideally imperfect” specimens provide structure factors only on a relative scale and ever-present multiple scattering in strong low-angle Bragg reflections is difficult to correct. Multiple scattering is implicit in the quantitative convergent beam electron diffraction (QCBED) method, which provides absolutely scaled structure factors. Conventional single crystal X-ray diffraction has proved adequate in softer materials where crystal perfection is limited. In hard materials, the highly perfect nature of the crystals is often a difficulty, due to the inadequacy of the conventional corrections for multiple scattering (extinction corrections). The present study on α-Al2O3 exploits the complementarity of synchrotron X-ray measurements for weak and medium intensities and QCBED measurement of the strong low-angle reflections. Two-dimensional near zone axis QCBED data from different crystals at various accelerating voltages, thicknesses, and orientations have been matched using Bloch-wave and multislice methods. The reproducibility of QCBED data is better than 0.5%. The low-angle strong QCBED structure factors were combined with middle and high-angle extinction-free data from synchrotron X-ray diffraction measurements. Static deformation charge density maps for α-Al2O3 have been calculated from a multipole expansion model refined using the combined QCBED and X-ray data.

Aromatic hydrocarbon (perylene, coronene) and tetracontane films are shown to produce useful convergent-beam electron diffraction (CBED) patterns under low-dose and low-temperature conditions. These were obtained using a Zeiss LEO-921 electron microscope with an omega energy filter at liquid helium and nitrogen temperatures. The usefulness of patterns showing CBED disks of constant intensity (“blank disks,” indicating kinematic scattering) for structure analysis is investigated, with the aim of avoiding film-bending artifacts. Using CBED patterns from thicker areas, sample thickness was experimentally determined using either two-beam or three-beam patterns. Koehler mode illumination (a new form of SAD pattern offering smaller areas) was also used, and the possibility of obtaining structure factor moduli using the kinematic and two-beam approximations was investigated by comparing measured diffraction intensities with experimental ones for these known structures. The commonly used approximation |F| ∼ Ig (intended to account for bending) was found to be a worse approximation than the two-beam approximation with well-defined excitation error for these microdiffraction experiments. A new multiwavelength method of retrieving structure factor moduli and thickness from microdiffraction patterns using two-beam theory is demonstrated for tetracontane.

We developed a novel electron-diffraction technique by focusing a small probe above (or below) the sample in an electron microscope to measure charge density and lattice displacement in technologically important materials. The method features the simultaneous acquisition of shadow images within many Bragg reflections, resulting in parallel recording of dark-field images (PARODI). Because it couples diffraction with images, it is thus suitable for studying crystals as well as their defects. We used this technique to accurately locate the charge-carrying holes in superconducting crystals, and to determine displacement vectors across planar faults by comparing the experiments with calculations, and by using fitting and error analyses. Examples are given for complex YBa2Cu3O7 and Bi2Sr2CaCu2O8+δ oxides and the newly discovered MgB2 superconductor.

The same Bragg reflection in TiO2 from 12 different (CBED) patterns (from different crystals, orientations, and thicknesses) are analyzed quantitatively to evaluate the consistency of the quantitative CBED method for bond-charge mapping. The standard deviation in the resulting distribution of derived X-ray structure factors is found to be an order of magnitude smaller than that in conventional X-ray work, and the standard error (0.026% for FX(110)) is slightly better than obtained by the X-ray Pendellösung method applied to silicon. This is sufficiently accurate to distinguish between atomic, covalent, and ionic models of bonding. We describe the importance of extracting experimental parameters from CCD camera characterization, and of surface oxidation and crystal shape. The current experiments show that the QCBED method is now a robust and powerful tool for low-order structure factor measurement, which does not suffer from the large extinction (multiple scattering) errors that occur in inorganic X-ray crystallography, and may be applied to nanocrystals. Our results will be used to understand the role of d-electrons in the chemical bonding of TiO2.

Of all the long-lived particles available as probes of condensed matter, and of all the signals available on a modern electron microscope, electron nanodiffraction patterns provide the strongest signal from the smallest volume. The technique is therefore perfectly suited to nanostructural investigations in inorganic chemistry and materials science. The Vacuum Generators HB501S, an ultrahigh vacuum (UHV) variant of the HB501 scanning transmission electron microscope (STEM), with side-entry double-tilt stage, specimen preparation and analysis chamber, three postspecimen lenses, and cold field-emission tip with integral magnetic gun lens, has therefore been modified to optimize nanodiffraction and quantitative convergent beam electron diffraction (QCBED) performance. A one-micrometer grain-size phosphor screen lying on a fiber-optic faceplate atop the instrument is fiber-optically coupled to a 2048 × 2048 charge-coupled device (CCD), 16-bit camera. This arrangement promises to provide much greater sensitivity, larger dynamic range, and a better modulation transfer function (MTF) than conventional single crystal scintillator (YAG) CCD systems, with noticeable absence of cross talk between pixels. The design of the nanodiffraction detector system is discussed, the gain of the detector is measured, the spherical aberration constant of the objective lens is measured by the Ronchigram method, and preliminary results from the modified instrument are shown.

Energy-filtered electron diffraction and three-dimensional reciprocal lattice mapping was used to study the nature of diffuse scattering in magnetite above the Verwey transition temperature. Characteristic Huang scattering associated with a single molecular polaron is observed at room temperature. As the temperature is lowered, the experiment shows narrowing of diffuse scattering in the 〈001〉 directions and additional ringlike diffuse scattering at q ∼ 0.8, which suggests the presence of one-dimensional structures above the Verwey transition. Experimental measurements of temperature-dependent correlation lengths and diffuse scattering intensity indicate an increase in the number and length of the one-dimensional structure as the temperature is cooled toward the transition. This study demonstrates the electron sensitivity to atomic displacement and the quality of electron diffraction data for studying phase transition in complex materials.

It is a pleasure to review the third edition of Scanning Electron Microscopy and X-Ray Microanalysis. The 15 chapter book can be divided into three sections: (1) scanning electron microscopy, (2) X-ray microanalysis, and (3) specimen preparation.