Hostname: page-component-5c6d5d7d68-thh2z Total loading time: 0 Render date: 2024-08-10T09:47:56.367Z Has data issue: false hasContentIssue false

Low Voltage Scanning Electron Microscopy and Jack Ramsey's principle

Published online by Cambridge University Press:  14 March 2018

Oliver C. Wells*
Affiliation:
IBM Research Division

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

“Low Voltage Scanning Electron Microscopy (LVSEM), defined as operation in the energy range below 5 keV” was described by David Joy and Dale Newbury (1) in the previous issue of this journal as being “perhaps the most important single operational mode of the SEM.” In their paper they describe both the advantages and disadvantages of this method.

Ramsey's principle, which was established by Jack Ramsey over many years as a microscopist and microanalyst, is to say: “There is no best way of doing ANYTHING.”

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2002

References

(1) Joy, D.C., Newbury, D.E., (2002), ‘Low Voltage Scanning Electron Microscopy’ Microscopy Today March/April 2002, p. 22 only.CrossRefGoogle Scholar
(2) Wells, O.C., Bailey, P.J., (1986), ‘Imaging of sub-surface structures in a solid specimen in the SEMEMSA Bulletin 16, 7677.Google Scholar
(3) Gentsch, P., Reimer, L., (1973), ‘Measurements of the Resolution in the Scanning Transmission Electron Microscopy of Thick Objects’ (in German with English abstract), Optik 37, 451454.Google Scholar
(4) Ardenne, M. von, (1940), ‘Elektronen-Uebermikroskopie’, Springer, Berlin (1940); Edwards, Ann Arbor (1943).Google Scholar
(5) Wells, O.C., (2002), ‘Imaging of silicon Integrated circuits by the low-loss electron (LLE) method in the scanning electron microscope (SEM)’, Proc. ALC'01, Nara, Japan, in press.CrossRefGoogle Scholar
(6) Knoll, M., (1935), ‘Static potential and secondary emission of bodies under electron irradiation’ (in German), Z. Tech. Phys. 11, 467475.Google Scholar