Hostname: page-component-7479d7b7d-q6k6v Total loading time: 0 Render date: 2024-07-10T09:22:39.957Z Has data issue: false hasContentIssue false

Precise SEM Cross Section Polishing via Argon Beam Milling

Published online by Cambridge University Press:  14 March 2018

N. Erdman*
Affiliation:
JEOL USA Inc., Peabody, Massachusetts
R. Campbell
Affiliation:
JEOL USA Inc., Peabody, Massachusetts
S. Asahina
Affiliation:
JEOL Ltd., Japan

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

SEM observation of a specimen cross section can provide important information for research and development as well as failure analysis. In most cases, surface observation alone cannot provide information concerning the cross sectional structure of granular materials, layered materials, fibrous materials, and powders. Preparing highly-polished cross sections of these materials is both a science and an art.

Typically, a cross section is prepared using mechanical means like conventional mechanical polishing methods or a microtome. The sample is first embedded in a holder or device, and then polished to achieve a flat cross section. In some cases, a staining procedure is used to highlight a specific component of the sample. Such methods can be lengthy procedures that require a great deal of skill, and can introduce artifacts into soft materials, deform the material around voids, or compress layers of soft and hard materials in composite samples. Mechanical polishing can miss fine details such as the presence of hairline cracks, and present a challenge to water-soluble phases.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2006

References

(1) Shibata, M., Asahina, S., Negishi, T., Proc. 8 APEM, (Kanazawa, 2004) p. 258.Google Scholar
(2) Hauffe, W., Electron Microscopy, Vol. 2, EUREM 92, Granada, Spain, 1992.Google Scholar