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Pros and Cons of Low Voltage SEM EDX Elemental Analysis
Published online by Cambridge University Press: 14 March 2018
Extract
It was Castaing who many years ago lamented “First 1 realized that in massive samples which concerned the metallurgists i would have to give up the splendid resolving power that I had cheerfully envisaged, as 1 became aware of the terrific path that my electrons would perform haphazardly in the sample before agreeing to stop. I had to limit my ambitions to analyzing volumes of a few cubic micrometers. This was a big disappointment. ..”. In the early days most instruments for imaging and microanalysis of bulk samples were restricted to operating only at relatively high beam energies (∼30kV) and for many (and perhaps too many) years this became the accepted operating procedure. However, we now know there are substantial advantages (pros) in using lower, and in some cases much lower, voltages; but also some significant limitations (cons). So what is possible?
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- Copyright © Microscopy Society of America 2003
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