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Advances In Analytical Auger Electron Spectroscopy

Published online by Cambridge University Press:  29 November 2013

Chuan C. Chang
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Abstract

Fundamental principles and experimental procedures for fully utilizing the power of Auger analysis are discussed. Topics include: quantitative analysis, high resolution imaging, depth profiling, and noise reduction. These studies reveal several improvements that might be expected in the immediate future and how they might be achieved. Some knowledge of Auger spectroscopy is assumed, but references on theory, principles, instrumentation, and applications are cited.

Type
Materials Microanalysis
Information
MRS Bulletin , Volume 12 , Issue 6 , September 1987 , pp. 70 - 74
Copyright
Copyright © Materials Research Society 1987

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References

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