Hostname: page-component-7479d7b7d-k7p5g Total loading time: 0 Render date: 2024-07-12T22:34:17.786Z Has data issue: false hasContentIssue false

Defects and Interfaces in GaN Epitaxy

Published online by Cambridge University Press:  29 November 2013

Get access

Extract

The recent developments in III-V-nitride thin-film technology has produced significant advances in high-performance devices operating in the blue and green range of the visible spectrum. These materials are grown by metalorganic chemical vapor deposition (MOCVD) on (0001) sapphire substrates. Highly specular surfaces are possible by use of low-temperature buffer layers following the method developed by Akasaki et al. The thin films thus grown have an interesting microstructure, quite different from other known semiconductors. In particular, epilayers with high optoelectronic performance are characterized by high dislocation densities, several orders of magnitude above those found in other optoelectronic semiconductor films. The lattice mismatch between sapphire and GaN is ∼14%, and the thermal-expansion difference is close to 80%. In spite of these large differences, little thermal strain is measurable at room temperature in epilayers grown at temperatures above 1000°C. Epitaxy on other systems, like SiC, with much better similarity in lattice parameter and thermal-expansion characteristics, has failed to produce better performance than films grown on sapphire. The origin of these puzzling properties of nitrides on sapphire rests in its microstructure. This article presents a survey of the microstructure associated with epitaxy of nitrides by MOCVD.

Type
Research Article
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Nakamura, S., Mukai, T., and Senoh, M., Appl. Phys. Lett. 64 (1994) p. 1687.CrossRefGoogle Scholar
2.Amano, H., Sawaki, N., Akasaki, I., and Toyoda, Y., Appl. Phys. Lett. 48 (1986) p. 353.CrossRefGoogle Scholar
3.Lester, S.D., Ponce, F.A., Craford, M.G., and Steigerwald, D.A., Appl. Phys. Lett. 66 (1995) p. 1249.CrossRefGoogle Scholar
4.Nakamura, S., Jpn. J. Appl. Phys. 30 (1991) p. L1705.CrossRefGoogle Scholar
5.Foresi, J.S. and Moustakas, T.D., Appl. Phys. Lett. 22 (1969) p. 1433.Google Scholar
6.Ponce, F.A., Bour, D.P., Gotz, W., and Wright, P.J., Appl. Phys. Lett. 68 (1996) p. 57.CrossRefGoogle Scholar
7.Ponce, F.A., Major, J.S. Jr., Piano, W.E., and Welch, D.F., Appl. Phys. Lett. 65 (1994) p. 2303.CrossRefGoogle Scholar
8.Fertitta, K.G., Holmes, A.L., Ciuba, F.J., Dupuis, R.D., and Ponce, F.A., J. Electron. Mater. 24 (1995) p. 257.CrossRefGoogle Scholar
9.Ponce, F.A., Krusor, B.S., Major, J.S., Piano, W.E., and Welch, D.F., Appl. Phys. Lett. 67 (1995) p. 410.CrossRefGoogle Scholar
10.Ponce, F.A., O'Keefe, M.A., and Nelson, E.C., Philos. Mag. A 55 (1996) p. 777.CrossRefGoogle Scholar
11.Ponce, F.A., Van de Walle, C.G., and Northrup, J.E., Phys. Rev. B 53 (1996) p. 7473.CrossRefGoogle Scholar
12.Ponce, F.A., Bour, D.P., Gotz, W., Johnson, N.M., Helava, H.I., Grzegory, I., Jun, J., and Porowski, S., Appl. Phys. Lett. 68 (1996) p. 917.CrossRefGoogle Scholar
13.Ponce, F.A., Bour, D.P., Young, W.T., Saunders, M., and Steeds, J.W., Appl. Phys. Lett. 69 (1996) p. 337.CrossRefGoogle Scholar
14.Ponce, F.A., Cherns, D., Young, W.T., and Steeds, J.W., Appl. Phys. Lett. 69 (1996) p. 770.CrossRefGoogle Scholar
15.Cherns, D. and Preston, A.R., Proc. 11th Int. Congress on Electron Microscopy (Japan Society of Electron Microscopy, Kyoto, 1986) p. 721.Google Scholar
16.Ponce, F.A., Cherns, D., Young, W.T., Steeds, J.W., and Nakamura, S. (unpublished manuscript).Google Scholar