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Oxynitride Glasses

Published online by Cambridge University Press:  29 November 2013

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Research on oxynitride glasses has expanded considerably since the first systematic compositional investigations were begun some ten years ago. This review will briefly introduce that work with an emphasis on more recent developments. Also included is some discussion of the applications of oxynitride glasses in both bulk and thin film form. The literature review is selective, however, and the recently developed phosphorus oxynitride glasses are only briefly mentioned. For more detailed information on earlier work on silicon oxynitride glasses see the reviews by Jack and Loehman. For discussions of phosphorus oxynitride glasses see Marchand, Peng and Day, and Rajaram and Day.

The development of bulk oxynitride glasses has been closely associated with research on Si3N4 and other nitrogen-containing ceramics. The initial discovery that large amounts of nitrogen can be incorporated in silicate glasses originated with analyses of glassy grain boundary phases in Si3N4 that was hot-pressed or sintered with different additives to promote liquid phase formation at the processing temperature. (Some applications of oxynitride glasses take advantage of that close connection to Si3N4. See Applications of Oxynitride Glasses below.) Later, systematic study of the bulk oxynitride glasses showed that nitrogen incorporation increases density, hardness, glass transition temperature and fracture toughness, and, to a certain extent, decreases the thermal expansion coefficient. Nitrogen additions also tend to lower glass solubility in aqueous solutions.

Type
Glasses
Copyright
Copyright © Materials Research Society 1987

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References

1.Jack, K.H., “Review-Sialons and Related Nitrogen Ceramics,” J. Mater. Sci. 11 (1976) p. 11351158.CrossRefGoogle Scholar
2.Loehman, R.E., “Oxynitride Glasses” in Treatise on Materials Science and Technology, Vol. 26, edited by Tomozawa, M. and Doremus, R. (Academic Press, New York, 1985) p. 119249.Google Scholar
3.Loehman, R.E., “Preparation and Properties of Oxynitride Glasses,” J. Non-Cryst. Solids 56 (1983) p. 123134.CrossRefGoogle Scholar
4.Marchand, R., “Nitrogen-Containing Phosphate Glasses,” J. Non-Cryst. Solids 56 (1983) p. 173178.CrossRefGoogle Scholar
5.Peng, Y.B. and Day, D.E., “Factors Affecting Nitrogen Dissolution in Sodium Metaphosphate Glass,” J. Am. Ceram. Soc. 70 [4] (1987) p. 232236.CrossRefGoogle Scholar
6.Rajaram, M. and Day, D.E., “Nitrogen Dissolution in Sodium Alkaline Earth Metaphosphate Melts,” J. Am. Ceram. Soc. 70 [4] (1987) p. 203207.CrossRefGoogle Scholar
7.Jack, K.H., “SiAlON Glasses,” in Nitrogen Ceramics, edited by Riley, F.L., (Noordhoff, Leiden, 1977) p. 257261.CrossRefGoogle Scholar
8.Loehman, R.E., “Preparation and Properties of Yttrium-Silicon-Aluminum Oxynitride Glasses,” J. Am. Ceram. Soc. 62 [9–10] (1979) p. 491494.CrossRefGoogle Scholar
9.Brow, R.K. and Pantano, C.G., “Nitrogen Coordination in Oxynitride Glasses,” J. Am. Ceram. Soc. (1984) p. C7274.Google Scholar
10.Mulfinger, H.O., “Physical and Chemical Solubility of Nitrogen in Glass Melts,” J. Am. Ceram. Soc. 49 [9] (1966) p. 462467.CrossRefGoogle Scholar
11.Elmer, T.H. and Nordberg, M.E., “Effect of Nitriding on Electrolysis and Devitrification of High Silica Glasses,” J. Am. Ceram. Soc. 50 [6] (1967) p. 275279.CrossRefGoogle Scholar
12.Wusirika, R.R., “Problems Associated with Melting of Oxynitride Glasses,” J. Am. Ceram. Soc. (1984) p. C232233.Google Scholar
13.Shaw, T.C., PhD thesis, University of California, Berkeley, LBL Report 11759 (1980).Google Scholar
14.Stull, D.R. and Prophet, H.JANAF Thermochemical Tables, 2nd ed., NSRDS-NBS Publication (U.S. Government Printing Office, Washington, DC, 1971), p. 37.Google Scholar
15.Wusirika, R.R., “Oxidation Behavior of Oxynitride Glasses,” J. Am. Ceram. Soc. 68 [1] (1985) p. C294297.CrossRefGoogle Scholar
16.Baik, S. and Raj, R., “Suppression of Frothing by Silicon Addition During Oxynitride Glass Synthesis,” J. Am. Ceram. Soc. 68 [7] (1985) p. C168170.CrossRefGoogle Scholar
17.Mittl, J.C., Tallman, R.L., Kelsey, P.V., and Jolley, J.G., “HIP Glassmaking for High Nitrogen Compositions in the Y-Si-Al-O-N System,” J. Non-Cryst. Solids 71 (1985) p. 287294.CrossRefGoogle Scholar
18.Homeny, J. and McGarry, D.L., “Preparation and Mechanical Properties of Mg-Al-Si-O-N Glasses,” J. Am. Ceram. Soc. 67 [11] (1984) p. C225227.CrossRefGoogle Scholar
19.Hampshire, S., Drew, R.L., and Jack, K.H., “Viscosities, Glass Transition Temperatures, and Microhardness of Y-Si-Al-O-N Glasses,” J. Am. Ceram. Soc. 67 [3] (1984) p. C4647.CrossRefGoogle Scholar
20.Tredway, W.K. and Loehman, R.E., “Scandium-Containing Oxynitride Glasses,” J. Am. Ceram. Soc. 68 [5] (1985) p. C131133.CrossRefGoogle Scholar
21.Wusirika, R.R. and Chyung, C.K., J. Non-Cryst. Solids 38 (1980) p. 3944.CrossRefGoogle Scholar
22.Shaw, T.M., Thomas, G., and Loehman, R.E., “Formation and Microstructure of Mg-Si-O-N Glasses,” J. Am. Ceram. Soc. 67 [10] (1984) p. 643647.CrossRefGoogle Scholar
23.Dinger, T.R., Rai, R.S., and Thomas, G., “Crystallization Behavior of a Glass in the Y2O3-SiO2-AlN System,” submitted to J. Am. Ceram. Soc.Google Scholar
24.Roth, R.L., Negas, T., and Cook, L.P., editors, Phase Diagrams for Ceramists, Vol. V (Am. Ceram. Soc., Columbus, OH, 1983), p. 310311.Google Scholar
25.Loehman, R.E., “Transient Liquid Phase Bonding of Si3N4 Ceramics,” in Surfaces and Interfaces in Ceramics and Ceramic-Metal Systems, edited by Pask, J.A. and Evans, A.G. (Plenum Press, New York, 1981) p. 701711.CrossRefGoogle Scholar
26.Mecartney, M.L., Sinclair, R., and Loehman, R.E., “Silicon Nitride Joining,” J. Am. Ceram. Soc. 68 [9] (1985) p. 472478.CrossRefGoogle Scholar
27.Johnson, S.M. and Rowcliffe, D.J., “Mechanical Properties of Joined Silicon Nitride,” J. Am. Ceram. Soc. 68 [9] (1985) p. 468472.CrossRefGoogle Scholar
28.Messier, D.R., personal communication.Google Scholar
29.Messier, D.R., DeGuire, I.J., and Katz, R.N., “Oxynitride Glass Fibers,” U.S. Patent No. 4 609 631 (September 2, 1986).Google Scholar
30.Paulik, S.W. and Homeny, J., “Mg-Al-Si-O-N and Mg-Al-Si-O-C Glass Matrices for SiC Fiber Reinforced Composites,” paper 51-G-87, 89th Annual Meeting, American Ceramic Society, Pittsburgh, PA, April 28, 1987.Google Scholar
31.Wilder, J.A., Day, D., and Bunker, B.C., Glastech Ber. 2 (1983) p. 845849.Google Scholar
32.Moslehi, M.M. and Saraswat, K.C., “Thermal Nitridation of Si and SiO2 for VLSI,” IEEE J. Solid-State Circuits SC-20 [1] (1985) p. 2643.CrossRefGoogle Scholar
33.VanDenHoek, W.G.M., “Characterization of Plasma-Enhanced Chemical Vapor Deposition of Silicon Oxynitride,” in Plasma Processing, edited by Coburn, J.W., Gottsch, R.A., and Hess, D.W. (Mater. Res. Soc. Proc. 68, Pittsburgh, PA, 1986) p. 335342.Google Scholar
34.Brow, R.K. and Pantano, G.G., “Thermo-Chemical Nitridation of Microporous Silica Films in Ammonia,” J. Am. Ceram. Soc. 70 [1] (1987) p. 914.CrossRefGoogle Scholar