Hostname: page-component-77c89778f8-vpsfw Total loading time: 0 Render date: 2024-07-19T22:32:44.407Z Has data issue: false hasContentIssue false
  • English
  • Français

Advances in 3D focused ion beam tomography

Published online by Cambridge University Press:  09 April 2014

Marco Cantoni  and
Lorenz Holzer
Marco Cantoni
Affiliation:
Materials and Basic Science, Swiss Federal Institute of Technology EPFL; marco.cantoni@epfl.ch
Lorenz Holzer
Affiliation:
Institute of Computational Physics, Zurich University of Applied Sciences; lorenz.holzer@zhaw.ch
Get access

Abstract

This article summarizes recent technological improvements of focused ion beam tomography. New in-lens (in-column) detectors have a higher sensitivity for low energy electrons. In combination with energy filtering, this leads to better results for phase segmentation and quantitative analysis. The quality of the 3D reconstructions is also improved with a refined drift correction procedure. In addition, the new scanning strategies can increase the acquisition speed significantly. Furthermore, fast spectral and elemental mappings with silicon drift detectors open up new possibilities in chemical analysis. Examples of a porous superconductor and a solder with various precipitates are presented, which illustrate that combined analysis of two simultaneous detector signals (secondary and backscattered electrons) provides reliable segmentation results even for very complex 3D microstructures. In addition, high throughput elemental analysis is illustrated for a multi-phase Ni-Ti stainless steel. Overall, the improvements in resolution, contrast, stability, and throughput open new possibilities for 3D analysis of nanostructured materials.

Keywords

focused ion beamFIB3Dtomography
Type
Research Article
Information
MRS Bulletin , Volume 39 , Issue 4: Focused Ion Beam Technology and Applications , April 2014 , pp. 354 - 360
Copyright
Copyright © Materials Research Society 2014 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Holzer, L., Cantoni, M., in Nanofabrication Using Focused Ion and Electron Beams—Principles and Applications, Utke, I., Moshkalev, S., Russell, P., Eds. (Oxford University Press, New York, 2012), pp. 410–435.Google Scholar
Inkson, B.J., Steer, T., Möbus, G., Wagner, T., J. Microsc. 201, 256 (2001).CrossRefGoogle Scholar
Inkson, B.J., Olsen, S., Norris, D.J., O’Neill, A.G., Möbus, G., in Microsc. Semicond. Mater. Conf. 180 (Institute of Physics Conference, Cambridge, 2003), pp. 611–616.Google Scholar
Uchic, M.D., Holzer, L., Inkson, B.J., Principe, E.L., Munroe, P., MRS Bull. 32, 408 (2007).Google Scholar
Holzer, L., Indutnyi, F., Gasser, P., Muench, B., Wegmann, M., J. Microsc. 216, 84 (2004).CrossRefGoogle Scholar
Holzer, L., Muench, B., Wegmann, M., Gasser, P., Flatt, R.J., J. Am. Ceram. Soc. 89, 2577 (2006).Google Scholar
Lasagni, F., Lasagni, A., Holzapfel, C., Mücklich, F., Degischer, H.P., Adv. Eng. Mater. 8, 719 (2006).CrossRefGoogle Scholar
Schaffer, M., Wagner, J., Schaffer, B., Schmied, M., Mulders, H., Ultramicroscopy 107, 587 (2007).CrossRefGoogle Scholar
Konrad, J., Zaefferer, S., Raabe, D., Acta Mater. 54, 1369 (2006).CrossRefGoogle Scholar
Uchic, M.D., Groeber, M.A., Dimiduk, D.M., Simmons, J.P., Scr. Mater. 55, 23 (2006).Google Scholar
Groeber, M.A., Haley, B.K., Uchic, M.D., Dimiduk, D.M., Ghosh, S., Mater. Charact. 57, 259 (2006).CrossRefGoogle Scholar
Zaefferer, S., Wright, S.I., Raabe, D., Metall. Mater. Trans. A 39A, 374 (2008).CrossRefGoogle Scholar
Wilson, J.R., Kobsiriphat, W., Mendoza, R., Chen, H., Hiller, J.M., Miller, D.J., Thornton, K., Voorhees, P.W., Adler, S.B., Barnett, A., Nat. Mater. 5, 541 (2006).Google Scholar
Wilson, J.R., Cronin, J.S., Barnett, S.A., Scr. Mater. 65, 67 (2011).Google Scholar
Iwai, H., Shikazono, N., Matsui, T., Teshima, H., Kishimoto, H., Kishida, R., Hayashi, D., Matsuzaki, K., Kanno, D., Saito, M., Muroyama, H., Eguchi, K., Kasagi, N., Yoshida, H., J. Power Sources 195, 955 (2010).Google Scholar
Vivet, N., Chupin, S., Estrade, E., Richard, A., Bonnamy, S., Rochais, D., Bruneton, E., J. Power Sources 196, 9989 (2011).CrossRefGoogle Scholar
Shikazono, N., Kanno, D., Matsuzaki, K., Teshima, H., Sumino, S., Kasagi, N., J. Electrochem. Soc. 157, B665 (2010).CrossRefGoogle Scholar
Holzer, L., Wiedenmann, D., Muench, B., Keller, L., Prestat, M., Gasser, P., Robertson, I., Grobéty, B., J. Mater. Sci. 48, 2934 (2013).CrossRefGoogle Scholar
Holzer, L., Iwanschitz, B., Hocker, T., Keller, L., Sartoris, G., Gasser, P., Muench, B., J. Power Sources 242, 179 (2013).CrossRefGoogle Scholar
Shearing, P.R., Howard, L.E., Jorgensen, P.S., Brandon, N.P., Harris, S.J., Electrochem. Commun. 12, 374 (2010).CrossRefGoogle Scholar
Keller, L.M., Holzer, L., Wepf, R., Gasser, P., Münchand, B., Marschall, P., Phys. Chem. Earth 36, 1539 (2011).Google Scholar
Keller, L., Holzer, L., Schuetz, P., Gasser, P., J. Geophys. Res. 118, 1 (2013).CrossRefGoogle Scholar
Steigerwald, M.D.G., Arnold, R., Bihr, J., Drexel, V., Jaksch, H., Preikszas, D., Vermeulen, J.P., Microsc. Microanal. 10 (Suppl. 2), 1372 (2004).Google Scholar
Pohl, D., Jaksch, H., Prakt. Metallogr. (Germany) 33 (5), 235 (1996).Google Scholar
Cantoni, M., Genoud, C., Hébert, C., Knott, G., Microsc. & Anal. 24 (4), 13 (2010).Google Scholar
Atlas3D, Carl Zeiss; http://microscopy.zeiss.com/microscopy/en_de/products/microscope-software/atlas.Google Scholar
Schindelin, J., Arganda-Carreras, I., Frise, E., Kaynig, V., Longair, M., Pietzsch, T., Preibisch, S., Rueden, C., Saalfeld, S., Schmid, B., Tinevez, J.-Y., White, D.J., Hartenstein, V., Eliceiri, K., Tomancak, P., Cardona, A., Nat. Methods 9 (7), 676 (2012).CrossRefGoogle Scholar
12th European Workshop of the European Microbeam Analysis Society on Modern Developments and Applications in Microbeam Analysis, Angers, France, May 15–19, 2011; http://www.emas-web.net/Content/archive2011.html.Google Scholar
Uglietti, D., Abächerli, V., Cantoni, M., Flükiger, R., IEEE Trans. Appl. Supercond. 17, 2 (2007).Google Scholar
Maleki, M., Cugnoni, J., Botsis, J., Acta Mater. 61 (1), (2013).Google Scholar
Monte Carlo simulation of electron trajectory in solids (Casino); http://www.gel.usherbrooke.ca/casino/index.html.Google Scholar
DTSA-II; http://www.cstl.nist.gov/div837/837.02/epq/dtsa2/index.html.Google Scholar
Burdet, P., Vannod, J., Hessler-Wyser, A., Rappaz, M., Cantoni, M., Acta Mater. 61 (8), 3090 (2013).CrossRefGoogle Scholar