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Focused Ion Beam Micro- and Nanoengineering

Published online by Cambridge University Press:  31 January 2011

Richard M. Langford ,
Philipp M. Nellen ,
Jacques Gierak  and
Yongqi Fu
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Abstract

This article discusses applications of focused ion beam micro- and nanofabrication. Emphasis is placed on illustrating the versatility of focused ion beam and dual-platform systems and how they complement conventional processing techniques. The article is divided into four parts: maskless milling, ion beam lithography, ion implantation, and techniques such as in situ micromanipulation.

Type
Research Article
Information
MRS Bulletin , Volume 32 , Issue 5: Focused Ion Beam Microscopy and Micromachining , May 2007 , pp. 417 - 423
Copyright
Copyright © Materials Research Society 2007

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