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Materials Analysis with High Energy Ion Beams Part III: Elastic Recoil Detection

Published online by Cambridge University Press:  29 November 2013

C.P.M. Dunselman ,
W.M. Arnold Bik ,
F.H.P.M. Habraken  and
W.F. van der Weg
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Abstract

The fundamentals of the high energy ion beam technique Elastic Recoil Detection are presented. The potential of this analysis technique for the depth-resolved determination of light elements in a heavy matrix is illustrated with examples from semiconductor technology.

Type
Materials Microanalysis
Information
MRS Bulletin , Volume 12 , Issue 6 , September 1987 , pp. 35 - 39
Copyright
Copyright © Materials Research Society 1987

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References

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