Hostname: page-component-848d4c4894-xm8r8 Total loading time: 0 Render date: 2024-06-26T19:53:42.357Z Has data issue: false hasContentIssue false
  • English
  • Français

Materials Analysis with High Energy Ion Beams Part III: Elastic Recoil Detection

Published online by Cambridge University Press:  29 November 2013

C.P.M. Dunselman ,
W.M. Arnold Bik ,
F.H.P.M. Habraken  and
W.F. van der Weg
Get access

Abstract

The fundamentals of the high energy ion beam technique Elastic Recoil Detection are presented. The potential of this analysis technique for the depth-resolved determination of light elements in a heavy matrix is illustrated with examples from semiconductor technology.

Type
Materials Microanalysis
Information
MRS Bulletin , Volume 12 , Issue 6 , September 1987 , pp. 35 - 39
Copyright
Copyright © Materials Research Society 1987

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.L'Ecuyer, J., Brassard, C., Cardinal, C., Chabbal, J., Deschenes, L., Labrie, J.P., Terreault, B., Martel, J.G., and St.-Jacques, R., J. Appl. Phys. 47 (1976) p. 381.CrossRefGoogle Scholar
2.Arnold, G.W., Doyle, B.L., and Bunker, B.C., in Proceedings of the Three-Day In-Depth Review of the Nuclear Accelerator Impact in the Interdisciplinary Field, edited by Mazzoldi, P. and Moschini, G. (Laboratori Nazionali di Legnaro, Padua, Italy, 1984) p. 50.Google Scholar
3.Feldman, L.C. and Mayer, J.W., Fundamentals of Surface and Thin Film Analysis (North-Holland, Amsterdam, 1986).Google Scholar
4.L'Ecuyer, J., Davies, J.A., and Matsunami, N., Nucl. Instrum. Methods 160 (1979) p. 337.CrossRefGoogle Scholar
5.Turos, A. and Meyer, O., Nucl. Instrum. Methods B4 (1984) p. 92.CrossRefGoogle Scholar
6.Moreau, C., Knystautas, E.J., Timsit, R.S., and Groleau, R., Nucl. Instrum. Methods 218 (1983) p. 111.CrossRefGoogle Scholar
7.Groleau, R., Gujrathi, S.C., and Martin, J.P., Nucl. Instrum. Methods 218 (1983) p. 11.CrossRefGoogle Scholar
8.Thomas, J.P. and Fallavier, M., in Proceedings of the Three-Day In-Depth Review of the Nuclear Accelerator Impact in the Interdisciplinary Field, edited by Mazzoldi, P. and Moschini, G. (Laboratori Nazionali di Legnaro, Padua, Italy, 1984) p. 127.Google Scholar
9.Petrascu, M., Berceanu, I., Brancus, I., Buta, A., Duma, M., Grama, C., Lazar, I., Mihai, I., Petrovici, M., Simion, V., Mihaila, M., and Ghita, I., Nucl. Instrum. Methods B4 (1984) p. 396.CrossRefGoogle Scholar
10.Yu, R. and Gustafsson, T., Surf. Sci. 177 (1986) p. L987.CrossRefGoogle Scholar
11.Habraken, F.H.P.M., Elferink, J.B. Oude, Eppenga, P., and Kuiper, A.E.T., in Proceedings of the Three-Day In-Depth Review of the Nuclear Accelerator Impact in the Interdisciplinary Field, edited by Mazzoldi, P. and Moschini, G. (Laboratori Nazionali di Legnaro, Padua, Italy, 1984) p. 50.Google Scholar
12.Elferink, J.B. Oude, Dunselman, K., Evers, E.J., Habraken, F.H.P.M., der Weg, W.F. van, and Holsbrink, J., Surf. Interface Analysis 9 (1986) p. 293.CrossRefGoogle Scholar
13.Bik, W.M. Arnoldet al., to be published.Google Scholar
14.Habraken, F.H.P.M., Tijhaar, R.H.G., der Weg, W.F. van, Kuiper, A.E.T., and Willemsen, M.F.C., J. Appl. Phys. 59 (1986) p. 447.CrossRefGoogle Scholar
15.Doyle, B.L. and Peercy, P.S., Appl. Phys. Lett. 34 (1979) p. 811.CrossRefGoogle Scholar
16.Bik, W.M. Arnoldet al., to be published.Google Scholar