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Serpentine-Patterned Compliant Thin Films of Stiff Materials Reduce Strain During Stretching

Published online by Cambridge University Press:  31 March 2011

Gopal Rao

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Type
Research‏Researchers
Information
MRS Bulletin , Volume 30 , Issue 12: Fabrication of Sub-45-nm Device Structures , December 2005 , pp. 925
Copyright
Copyright © Materials Research Society 2005