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New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope

Published online by Cambridge University Press:  23 April 2018

Nicola Stehling Open the ORCID record for Nicola Stehling [Opens in a new window] ,
Robert Masters ,
Yangbo Zhou ,
Robert O'Connell ,
Chris Holland Open the ORCID record for Chris Holland [Opens in a new window] ,
Hongzhou Zhang  and
Cornelia Rodenburg Open the ORCID record for Cornelia Rodenburg [Opens in a new window]
Nicola Stehling
Affiliation:
University of Sheffield Faculty of Engineering, Material Science and Engineering, Sheffield, S1 3JD, UK
Robert Masters
Affiliation:
University of Sheffield Faculty of Engineering, Material Science and Engineering, Sheffield, S1 3JD, UK
Yangbo Zhou
Affiliation:
Nanchang University, School of Material Science and Engineering, Nanchang, Jiangxi, 330031, China
Robert O'Connell
Affiliation:
University of Dublin Trinity College, School of Physics, Dublin 2, Ireland
Chris Holland
Affiliation:
University of Sheffield Faculty of Engineering, Material Science and Engineering, Sheffield, S1 3JD, UK
Hongzhou Zhang
Affiliation:
University of Dublin Trinity College, School of Physics, Dublin 2, Ireland
Cornelia Rodenburg*
Affiliation:
University of Sheffield Faculty of Engineering, Material Science and Engineering, Sheffield, S1 3JD, UK
*
Address all correspondence to Cornelia Rodenburg at C.Rodenburg@sheffield.ac.uk
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Abstract

The helium ion microscope (HeIM) holds immense promise for nano-engineering and imaging with scope for in-situ chemical analysis. Here we will examine the potential of secondary electron hyperspectral imaging (SEHI) as a new route to exploring chemical variations in both two and three dimensions. We present a range of early applications in the context of image interpretation in wider materials science and process control in ion beam-based nano-engineering. Necessary steps for SEHI in the HeIM to evolve into a reliable technique which can be fully embedded into nano-engineering workflows are considered.

Type
Prospective Articles
Information
MRS Communications , Volume 8 , Issue 2 , June 2018 , pp. 226 - 240
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Copyright © Materials Research Society 2018 

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