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5MeV Si Ion Modification on Thermoelectric SiO2/SiO2+Cu Multilayer Films
Published online by Cambridge University Press: 31 August 2011
Abstract
We prepared samples by electron beam physical vapor deposition EB-PVD followed by ion bombardment. The samples were than characterized by photoluminescence (PL), x-ray photoelectron spectroscopy (XPS). PL was used to characterize the available energy states. XPS was used to determine the binding energies. The ML’s are comprised of 100 alternating layers of SiO2/SiO2+Cu.
- Type
- Research Article
- Information
- MRS Online Proceedings Library (OPL) , Volume 1354: Symposium II – Ion Beams—New Applications from Mesoscale to Nanoscale , 2011 , mrss11-1354-ii07-01
- Copyright
- Copyright © Materials Research Society 2011