Hostname: page-component-5c6d5d7d68-7tdvq Total loading time: 0 Render date: 2024-08-11T18:34:09.906Z Has data issue: false hasContentIssue false
  • English
  • Français

Analysis of Surface Structural Defects by Low Energy Electron Diffraction

Published online by Cambridge University Press:  15 February 2011

D. G. Welkie  and
M. G. Lagally
D. G. Welkie
Affiliation:
Perkin-Elmer, Physical Electronics Division, Eden Prairie, MN (U.S.A.)
M. G. Lagally
Affiliation:
Department of Metallurgical and Mineral Engineering and Materials Science Center, University of Wisconsin-Madison, Madison, W153706 (U.S.A.)
Get access

Extract

The characterization of surface structural defects by low energy electron diffraction is discussed. The identification of crystal mosaic structure, random strain, antiphase domains and steps is emphasized, and it is shown that they produce characteristic effects in the angular distribution of intensity in diffracted beams. Analytical models are summarized. They are also applicable to other surfacesensitive diffraction techniques such as reflection high energy electron diffraction and grazing angle X-ray diffraction. The quantitative analysis of these several types of defects is illustrated by measurements on the surface of an epitaxially grown Ag(111) film and on a sputter-etched and annealed GaAs(110) surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 10: Symposium C – Thin Films and Interfaces I , 1981 , 227
Copyright
Copyright © Materials Research Society 1982

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Neugebauer, C. A., in Maissel, L. I. and Glang, R. (eds.), Handbook of Thin Film Technology, McGraw-Hill, New York, 1970.Google Scholar
2 Cohen, J.B. and Hilliard, J. B. (eds.), Local Atomic Arrangements Studiedby X-Ray Diffraction, Vol. 36, Gordon and Breach, New York, 1966.Google Scholar
3 Jona, F., Surf Sci., 8 (1967) 478.Google Scholar
3a Rhead, G. E., Surf Sci., 68 (1977) 20.Google Scholar
4 Lu, T.-M. and Lagally, M. G., Surf Sci., 99 (1980) 695.CrossRefGoogle Scholar
5 Guinier, A., X-Ray Diffraction, Freeman, San Francisco, 1963.Google Scholar
6 Park, R. L., J. Appl. Phys., 37 (1966) 295.CrossRefGoogle Scholar
7 Park, R. L., in Somorjai, G. A. (ed.), The Structure and Chemistry of Solid Surfaces, Wiley, New York, 1969.Google Scholar
8 Henzler, M., Surf Sci., 19 (1970) 159.Google Scholar
9 Henzler, M., Surf Sci., 22 (1970) 12.CrossRefGoogle Scholar
10 Henzler, M., in Ibach, H. (ed.), Electron Spectroscopy for Surface Analysis, Springer, Berlin, 1977.Google Scholar
11 Welkie, D. G., Lagally, M. G. and Palmer, R. L., J. Vac. Sci. Technol., 17 (1980) 453.Google Scholar
12 Wang, G.-C. and Lagally, M. G., Surf Sci., 81 (1979) 69.CrossRefGoogle Scholar
12a Wang, G.-C., Lu, T.-M. and Lagally, M. G., J. Chem. Phys., 69 (1978) 479.Google Scholar
13 Welkie, D. G. and Lagally, M. G., J. Vac. Sci. Technol., 16 (1979) 784.CrossRefGoogle Scholar
14 Lu, T.-M., Wang, G. C. and Lagally, M. G., Surf Sci., 92 (1980) 133.Google Scholar
15 Lagally, M. G. and Webb, M. B., in Somorjai, G. A. (ed.), The Structure and Chemistry of Solid Surfaces, Wiley, New York, 1969.Google Scholar
16 McKinney, J. T., Jones, E. R. and Webb, M. B., Phys. Rev., 160 (1967) 523.Google Scholar
16a Barnes, R. F., Lagally, M. G. and Webb, M. B., Phys. Rev., (1968) 627.Google Scholar
17 Dennis, R. L. and Webb, M. B., J. Vac. Sci. Technol., 10 (1974) 192.Google Scholar
18 Cullity, B. D., Elements of X-Ray Diffraction, Addison-Wesley, Reading, MA, 1978.Google Scholar
19 Warren, B. E., Prog. Met. Phys., 8 (1959) 147.Google Scholar
20 Blakely, J. M., Introduction to the Properties of Crystal Surfaces, Pergamon, New York, 1973.Google Scholar
21 Matysik, K. J., Surf Sci., 46 (1974) 457.CrossRefGoogle Scholar
22 Warren, B. E. and Averbach, B. L., J. Appl. Phys., 20 (1949) 885; 21 (1950) 595; 23 (1952) 497.CrossRefGoogle Scholar
23 Welkie, D. G., Ph.D. Dissertation, University of Wisconsin-Madison, 1981. D. G. Welkie and M. G. Lagally, to be published.Google Scholar
24 Wagner, C. N. J., in Cohen, J. B. and Hilliard, J. E. (eds.), Local Atomic Arrangements Studied by X-ray Diffraction, Vol. 36, Gordon and Breach, New York, 1966.Google Scholar
25 Seah, M.P., Surf Sci., 17(1969) 181.Google Scholar
26 Wang, G.-C., Ph.D. Dissertation, University of Wisconsin-Madison, 1978.Google Scholar
26a Lagally, M. G., Lu, T.-M. and Wang, G.-C., in Vanselow, R. (ed.), The Chemistry and Physics of Solid Surfaces, Vol. 2, CRC Press, Boca Raton, FL, 1979.Google Scholar
27 Lu, T.-M., Wang, G.-C. and Lagally, M. G., Surf Sci., 107 (1981) 234.Google Scholar
28 Perdereau, J. and Rhead, G. E., in Coll. Int. Struct. Prop. Surfaces Solides, CNRS, Paris, 1969.Google Scholar
29 Henzler, M., Appl. Phys., 9 (1976) 11.Google Scholar
30 Burton, W. K., Cabrera, H. and Frank, F. C., Philos. Trans. R. Soc. London, 243 (1951) 299.Google Scholar
31 Houston, J. E. and Park, R. L., Surf Sci., 26 (1971) 269.CrossRefGoogle Scholar
32 Henzler, M., Surf Sci., 73 (1978)240.Google Scholar
33 Lu, T.-M., Anderson, S. R., Lagally, M. G. and Wang, G.-C., J. Vac. Sci. Technol., 17 (1980) 207.Google Scholar
33a Lu, T.-M. and Lagally, M. G., Surf Sci., 120 (1982), in the press.Google Scholar
34 Adler, R. P. I. and Wagner, C. N. J., J. Appl. Phys., 33 (1962) 3451.Google Scholar
35 Pashley, D. W., in Wilsdorf, H. G. F. (ed.), Thin Films, American Society for Metals, Metals Park, OH, 1963, Chapter 3.Google Scholar
36 Sen, S., Halder, S. K. and Sen Gupta, P., J. Phys. D, 8 (1975) 1709.Google Scholar
37 Lagally, M. G., Lu, T.-M. and Welkie, D. G., J. Vac. Sci. Technol., 17 (1980) 223.Google Scholar
38 Lagally, M. G., in Vanselow, R. and Howe, R. (eds.), Chemistry and Physics of Solid Surfaces, Vol. 4, Springer Series in Chemical Physics, Vol. 20, Springer, Heidelberg, 1982, p. 281.Google Scholar
39 Welkie, D. G. and Lagally, M. G., in Wiffen, F. W. (ed.), Advanced Techniquesfor the Characterization of Microstructure, Metallurgical Society of the AIME, Warrendale, PA, 1982.Google Scholar