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Asymmetrical Polysilicon Electrothermal Microactuators for Achieving Large In-Plane Mechanical Forces and Deflections
Published online by Cambridge University Press: 17 March 2011
Abstract
This research focuses on the design and experimental characterization of two types of asym- metrical MEMS electrothermal microactuators. Both MEMS polysilicon electrothermal microac- tuator designs use resistive (Joule) heating to generate thermal expansion and movement. Deflection and force measurements as a function of applied electrical power are presented.
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- Copyright © Materials Research Society 2001