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Characteristics Analysis of Saw Filter Using Al0.36Ga0.64N Thin Film

Published online by Cambridge University Press:  01 February 2011

Sun-Ki Kim ,
Min-Jung Park ,
Cheol-Yeong Jang ,
Hyun-Chul Choi ,
Jung-Hee Lee  and
Yong-Hyun Lee
Sun-Ki Kim
Affiliation:
School of Electronic Engineering & Computer Science, Kyungpook National University, 1370 Sankyuk-Dong, Buk-Gu, Daegu, Korea, e-mail: yhlee@ee.knu.ac.kr
Min-Jung Park
Affiliation:
School of Electronic Engineering & Computer Science, Kyungpook National University, 1370 Sankyuk-Dong, Buk-Gu, Daegu, Korea, e-mail: yhlee@ee.knu.ac.kr
Cheol-Yeong Jang
Affiliation:
School of Electronic Engineering & Computer Science, Kyungpook National University, 1370 Sankyuk-Dong, Buk-Gu, Daegu, Korea, e-mail: yhlee@ee.knu.ac.kr
Hyun-Chul Choi
Affiliation:
School of Electronic Engineering & Computer Science, Kyungpook National University, 1370 Sankyuk-Dong, Buk-Gu, Daegu, Korea, e-mail: yhlee@ee.knu.ac.kr
Jung-Hee Lee
Affiliation:
School of Electronic Engineering & Computer Science, Kyungpook National University, 1370 Sankyuk-Dong, Buk-Gu, Daegu, Korea, e-mail: yhlee@ee.knu.ac.kr
Yong-Hyun Lee
Affiliation:
School of Electronic Engineering & Computer Science, Kyungpook National University, 1370 Sankyuk-Dong, Buk-Gu, Daegu, Korea, e-mail: yhlee@ee.knu.ac.kr
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Abstract

AlxGa1-xN sample with x=0.36 was epitaxially grown on sapphire by MOCVD. SAW velocity of 5420 m/s and TCF (temperature coefficient of frequency) of -51.20 ppm/°C were measured from the SAW devices fabricated on the AlxGa1-xN sample, when kh value was 0.078, at temperatures between –30 °C and 60 °C Electromechanical coupling coefficient was ranged from 1.26 % to 2.22 %. The fabricated SAW filter have shown a good device performance with insertion loss of -33.853 dB and side lobe attenuation of 20 dB.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 720: Symposium H – Materials Issues for Tunable RF and Microwave Devices III , 2002 , H3.1
Copyright
Copyright © Materials Research Society 2002

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