Article contents
Deposition of Dielectric Optical Coatings: A Microstructural Study of the Deposited Layers and Interfaces
Published online by Cambridge University Press: 21 February 2011
Abstract
Thin dielectric films for optical applications are deposited on substrates using a variety of techniques including reactive sputtering, solgel reaction, and ion assisted plasma deposition. This transmission electron microscopy study characterizes optical coatings produced by the above deposition techniques and shows how changes in deposition conditions change microstructure and as a result the optical properties.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1989
References
REFERENCES
- 1
- Cited by