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Deposition Schemes for Low Cost Transparent Conductors for Photovoltaics

Published online by Cambridge University Press:  10 February 2011

A. E. Delahoy  and
M. Cherny
A. E. Delahoy
Affiliation:
Energy Photovoltaics, Inc., Princeton, NJ 08543
M. Cherny
Affiliation:
Energy Photovoltaics, Inc., Princeton, NJ 08543
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Abstract

Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:AI prepared on 0.43 m2 substrates by bipolar, reactive sputtering from ZnO:A12O3 targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study the state of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 426: Symposium J – Thin Films for Photovoltaic and Related Device , 1996 , 467
Copyright
Copyright © Materials Research Society 1996

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