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Determination of Hydrogen in Semiconductors and Related Materials by Cold Neutron Prompt Gamma-ray Activation Analysis

Published online by Cambridge University Press:  17 March 2011

Rick L. Paul
Rick L. Paul*
Affiliation:
Analytical Chemistry Division National Institute of Standards and Technology Gaithersburg, MD 20899
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Abstract

An instrument for prompt gamma-ray activation analysis (PGAA) at the NIST Center for Neutron Research has proven useful for the measurement of hydrogen and other elements in a variety of materials. The sample is irradiated by a beam of low energy neutrons. Gamma-rays emitted by atomic nuclei upon neutron capture are measured and elemental concentrations determined by comparison with appropriate standards. The detection limit for hydrogen is < 5 mg/kg in most materials, and 2 mg/kg for hydrogen measured in silicon. The instrument has been used to measure hydrogen mass fractions of < 100 mg/kg in high purity germanium, and < 10 mg/kg in quartz. More recently PGAA has been used to measure hydrogen in 1 μm thick porous thin films on a silicon substrate, and in crystals of silicon carbide and cerium aluminate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 813: Symposium G – Hydrogen in Semiconductors , 2004 , H2.2
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

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