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Diamond Synthesis From Acetone Vapor And Impurity Control

Published online by Cambridge University Press:  11 February 2011

Kaoru Gyoda ,
Yuki Tanaka  and
Yoshiki Takagi
Kaoru Gyoda
Affiliation:
Teikyo University of Science & Technology, 2525, Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi-Pref., 409–0193, JAPAN.
Yuki Tanaka
Affiliation:
Teikyo University of Science & Technology, 2525, Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi-Pref., 409–0193, JAPAN.
Yoshiki Takagi
Affiliation:
Teikyo University of Science & Technology, 2525, Yatsusawa, Uenohara-machi, Kitatsuru-gun, Yamanashi-Pref., 409–0193, JAPAN.
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Abstract

We synthesized diamond via gaseous phase of vaporized acetone. Molecular acetone decomposes to two methyl radicals with thermal activation. We propose here a new method for diamond synthesis with these methyl radicals from molecular acetone. With this method, we successfully synthesized diamond particles on Si substrates with shorter experimental time and lower energy consumption than conventional methods. With liquid carbon sources, such as acetone, impurity elements will be easily substituted in synthesized diamond thin film, which has wide applications for the future electronic devices. Nickel, Boron and Phosphorus doping results will be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 749: Symposium W – Morphological and Compositional Evolution of Thin Films , 2002 , W18.3
Copyright
Copyright © Materials Research Society 2003

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References

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