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Direct Defect Imaging in the High Resolution Sem

Published online by Cambridge University Press:  21 February 2011

David C Joy*
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory+, Oak Ridge, TN 37831 and EM Facility, University of Tennessee, Knoxville, TN 37996-0810
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Abstract

The theory of imaging crystallographic defects in solid specimens through the use of electron channeling contrast is reviewed and the necessary conditions for observation are deduced. It is shown that current high performance field emission scanning electron microscopes can meet these requirements and produce dislocation images from suitable materials.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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References

1. Hirsch, P B, Howie, A and Whelan, M J, Phil.Mag. 7, 2095 (1962)Google Scholar
2. Coates, D G, Phil.Mag. 16, 1179 (1967)Google Scholar
3. Stem, R M, Ichinokawa, T, Takashima, S, Hashimoto, H and Kimoto, , Phil.Mag. 26, 1495 (1972)Google Scholar
4. Clarke, D R, Phil. Mag. 24, 973 (1971)Google Scholar
5. Joy, D C, Thompson, M N, Booker, G R, and Anderson, W H J, Phys. Stat. Sol., (a), 21, K1 (1974)10.1002/pssa.2210210144Google Scholar
6. Morin, P, Pitaval, M, Besnard, D. and Fontaine, G, Phil.Mag., 40, 511(1979)Google Scholar
7. Hall, C R, and Hirsch, P B, Proc.Roy.Soc., A286, 158 (1965)Google Scholar
8. Hirsch, P B, and Humphreys, C J, in Scanning Electron Microscopy/1970. edited by Johari, O, (IITRI,Chicago, 1970), 449 Google Scholar
9. Clarke, D R, and Howie, A, Phil.Mag., 24, 959 (1971)Google Scholar
10. Humphreys, C J, Spencer, J P, Woolf, R J, Joy, D C, Titchmarsh, J M, and Booker, G R, in Scanning Electron Microscopy /1972, edited by Johari, O., (IITRI,Chicago, 1972), 205 Google Scholar