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Doped Amorphous SiC, Mixed Carbide and Oxycarbide Thin Films by a Liquid Route

Published online by Cambridge University Press:  26 February 2011

C-J Chu ,
E. Liimatta  and
J. D. Mackenzie
C-J Chu
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA90024
E. Liimatta
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA90024
J. D. Mackenzie
Affiliation:
Department of Material Science and Engineering, University of California, Los Angeles, CA90024
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Abstract

A new family of disordered materials called amorphous covalent ceramics (ACC) has been obtained by pyrolysis of metal-organic polymers. The transformation from polycarbosilane to amorphous and microcrystalline SiC has been studied. New a-SiC:H thin films have also been prepared by the polymer solution. Electrical and optical properties of this new a-SiC have studied. Amorphous binary carbide and oxycarbide have also been prepared by crosslinking polycarbosilane and metal alkoxides. The p-n control of this new a-SiC:H has been achieved, which also lead to the possible device applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 162: Symposium F – Diamond, Silicon Carbide and Related Wide Bandgap Semiconductors , 1989 , 421
Copyright
Copyright © Materials Research Society 1990

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References

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