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The Effect of Hydrogen Ion Bombardment on Fluorocarbon Polymers

Published online by Cambridge University Press:  28 February 2011

Teresa L. Cheeks  and
Arthur L. Ruoff
Teresa L. Cheeks
Affiliation:
Dept. of Materials Science and Engineering, Cornell UniversityIthaca, N.Y. 14853
Arthur L. Ruoff
Affiliation:
Dept. of Materials Science and Engineering, Cornell UniversityIthaca, N.Y. 14853
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Abstract

Polytetrafluoroethylene(PTFE), Polyvinylidene fluoride(PVFD), and Polymethylmethacrylate(PMMA) thin films have been bombarded with a H2 ion beam. The ion exposure time varied from 3 to 12 minutes corresponding to an ion dose of 1017H+/cm2 to 1018H+/cm2. ESCA spectra showed that the fluorine intensity from the fluorocarbon polymers decreased after H2 ion bombardment. Also the CF2 type bond groups observed in the fluorocarbon polymers decreased leaving only the hydrocarbon type bond groups (CH2) after H2 ion bombardment. We speculate that the hydrogen atoms abstract fluorine from the polymer which decreases the fluorine concentration. ESCA has been used to determine the effect of chemical vs. inert (H2 vs. He) ion bombardment on fluorocarbon polymers as a function of exposure time. The implication of these results to explain the differences between RIE and RIBE deposited polymers will be discussed.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 75: Symposium B – Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces , 1986 , 527
Copyright
Copyright © Materials Research Society 1987

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References

1. Webb, A.P., Brewer, R., Steussi, H. and Veprek, S., J. Nucl. Mater. 93/94, 634 (1980).CrossRefGoogle Scholar
2. Robinson, F. and Tracy, C., U.S. Patent No. 4 201 579 (1980).Google Scholar
3. Robb, F.Y., J. Electrochem. Soc. 131 (7), 1670 (1984).CrossRefGoogle Scholar
4. Hiraoka, , J. Vac. Sci. Tech. 4, 345 (1986).CrossRefGoogle Scholar
5. Field, F.H. and Frank, J.L., Electron Impact Phenomena and the Properties of Gaseous Ions, edited by Massey, H.S.W. and Brueckner, K.A. (Academic Press, New York, 1970) p. 252.Google Scholar
6. Rapp, D. and Golden, P.E., J. Chem. Phys. 43 (5), 1464 (1965).CrossRefGoogle Scholar
7. Rapp, D., Golden, P.E. and Briglia, D.D., J. Chem. Phys. 42 (12), 4081 (1965).CrossRefGoogle Scholar
8. Goodyear, C.C. and Engel, A. Von, Proc. Phys. Soc. 79, 732 (1962).CrossRefGoogle Scholar
9. Chang, R.P.H., Chang, C.C. and Darack, S., J. Vac. Sci. Tech. 20 (1), 45 (1982).CrossRefGoogle Scholar
10. Cheeks, T.L. and Ruoff, A.L. (unpublished results)Google Scholar
11. Hiraoka, H., IBM J. Res. Dev. 21, 121 (1977).CrossRefGoogle Scholar
12. Kelber, J.A., Rogers, J.W. Jr. and Ward, S.J., J. Mater. Res. 1 (5), 717 (1986).CrossRefGoogle Scholar
13. Clark, D.T. and Feast, W.J., J. Macromol. Sci - Revs. Macromol. Chem. C12 (12), 191 (1975).CrossRefGoogle Scholar
14. Dwight, D.W. and Riggs, W.M., J. of Colloid and Interface Science 47 (3), 650 (1974).CrossRefGoogle Scholar
15. Yasuda, H., Marsh, H.C., Brandt, E.S. and Reilley, C.N., J. Polymer Science-Polymer Chem.Ed. 15, 991 (1977).CrossRefGoogle Scholar
16. Pepper, S.V., J. Appl. Phys. 45, 2947 (1974).CrossRefGoogle Scholar
17. Wheeler, D.R. and Pepper, S.V., J. Vac. Sci. Tech. 20, 226 (1982).CrossRefGoogle Scholar
18. Clark, D.T., Dilks, A. and Shuttleworth, D., Polymer Surfaces, (Wiley Publishers, New York, 1978) pp. 185–211, pp. 309–351.Google Scholar
19. Ginnard, C.R. and Riggs, W.M., Anal. Chem 44, 1310 (1972).CrossRefGoogle Scholar
20. Clark, D.T., Feast, W.J., Kilcast, D. and Musgrave, W.K.R., J. Polymer Science-Polymer Chem. Ed. 11, 389 (1973).CrossRefGoogle Scholar
21. Flamm, D.L. and Donnelly, V.M., Plasma Chemistry and Plasma Processes 317 (1), (1981).Google Scholar
22. Cheeks, T.L. and Ruoff, A.L., to be published in J. Vac. Sci. Tech. A, Jul-Aug. (1987)Google Scholar