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Electric Force Microscopy Of Individually Charged Silicon Nanoparticles

Published online by Cambridge University Press:  01 February 2011

Thierry Melin ,
Heinrich Diesinger ,
Sophie Barbet ,
Dominique Deresmes ,
Thierry Baron  and
Didier Stievenard
Thierry Melin
Affiliation:
Institut d'Electronique de Microélectronique et de Nanotechnologie, IEMN-CNRS UMR 8520, Avenue Poincaré, BP 69, F-59652 Villeneuve d'Ascq Cedex, France
Heinrich Diesinger
Affiliation:
Institut d'Electronique de Microélectronique et de Nanotechnologie, IEMN-CNRS UMR 8520, Avenue Poincaré, BP 69, F-59652 Villeneuve d'Ascq Cedex, France
Sophie Barbet
Affiliation:
Institut d'Electronique de Microélectronique et de Nanotechnologie, IEMN-CNRS UMR 8520, Avenue Poincaré, BP 69, F-59652 Villeneuve d'Ascq Cedex, France
Dominique Deresmes
Affiliation:
Institut d'Electronique de Microélectronique et de Nanotechnologie, IEMN-CNRS UMR 8520, Avenue Poincaré, BP 69, F-59652 Villeneuve d'Ascq Cedex, France
Thierry Baron
Affiliation:
Laboratoire des Technologies de la Microélectronique, LTM-CNRS, Leti, CEA-Grenoble, 17 rue des Martyrs, F-38054 Grenoble Cedex, France
Didier Stievenard
Affiliation:
Institut d'Electronique de Microélectronique et de Nanotechnologie, IEMN-CNRS UMR 8520, Avenue Poincaré, BP 69, F-59652 Villeneuve d'Ascq Cedex, France
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Abstract

We report on charge injection experiments performed on single silicon nanoparticles and their analysis by Electric Force Microscopy (EFM). An analytical model is presented, enabling a quantitative determination of the charge state of the semiconductor nanoparticles from EFM signals, for arbitrary tip and nanoparticle shapes.

Experimentally, we provide an analysis of the capacitive and charge interactions taking place in EFM of silicon nanoparticles deposited on conductive substrates. We demonstrate that the weak image interactions associated with charged nanoparticles -of dipole-dipole type- can be identified from a spectroscopic EFM analysis.

Finally, we address the issue of the charge injection mechanisms. From the hysteretic behaviour of the charge injection spectroscopy, we separate volume versus surface charge effects. We show that charges are mostly injected in the nanoparticle volume, with however some residual injection on the nanoparticle surface. Mechanisms of the charge saturation are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 832: Symposium F – Group IV Semiconductor Nanostructures , 2004 , F8.1
Copyright
Copyright © Materials Research Society 2005

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References

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