Hostname: page-component-84b7d79bbc-dwq4g Total loading time: 0 Render date: 2024-07-31T07:19:05.205Z Has data issue: false hasContentIssue false
  • English
  • Français

Emitting Carbon Thin Films and Their Characterizations

Published online by Cambridge University Press:  10 February 2011

Z. Li Tolt ,
R. L. Fink  and
Zvi Yaniv
Z. Li Tolt
Affiliation:
FEPET, Inc., 12100-A Technology Blvd., Austin, TX 78727
R. L. Fink
Affiliation:
FEPET, Inc., 12100-A Technology Blvd., Austin, TX 78727
Zvi Yaniv
Affiliation:
FEPET, Inc., 12100-A Technology Blvd., Austin, TX 78727
Get access

Abstract

Carbon thin film cathodes have been produced with an emission site density of 2 × 105/cm2 and with current density higher than 40 mA/cm2at 10 V/μm extraction field. Characterization of the film bonding structure by UV Raman spectroscopy and emission sites by Atomic Force Microscopy (AFM) are presented and discussed in detail. A hypothesis of the nature of emission sites in these films is proposed in accordance with the analyses.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 509: Symposium C – Materials Issues in Vacuum Microelectronics , 1998 , 47
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Okano, Ken, Koizumi, Satoshi, Ravi, S. siva, P. and Gehan Amaratunga, A. J., Nature, 381, 140(1996)Google Scholar
2 Jaskie, J., MRS Bulletin, 21, 59(1996)Google Scholar
3 Tolt, Z. Li, Fink, R. L., Yaniv, Zvi, JVST B, May/June, 1998.Google Scholar
4 Zhu, W., Kochanski, G. P., Jin, S., Seibles, L., J. Appl. Phys. 78(4), 2707(1995)Google Scholar
5 Geis, M., Twichell, J. W. and Lyszczarz, T. M., J. Vac. Sci. Technol. B14, 2060(1996)Google Scholar
6 Lerner, P. B., Cutler, P. H. and Miskovsky, N. M., Journ. De Physique III, 6, Colloqure 5–39(1996)Google Scholar
7 Tolt, Z. Li, Fink, R. L., Yaniv, Zvi, Nikkei Microdevices'Flat Panel Display 1998 Yearbook, English translation published by InterLingua (1998) p. 186.Google Scholar
8 Bormett, Richard W., Asher, Sanford A., Witowske, Robert E., Partlow, William D., Lizewski, Robert and Pettit, Fred, J. Appl. Phys. 77(11) 5916(1995).Google Scholar
9 Asher, Sanford A. and Munro, C. H., private communication.Google Scholar
10 Inoue, T., Carpick, R., Ogletree, D. F., and Salmeron, M. of LBNL, and Tolt, Z. Li, Fink, R. L., and Yaniv, Zvi of FEPET, Inc., to be published.Google Scholar