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Evolution of SOI MOSFETs: from Single Gate to Multiple Gates
Published online by Cambridge University Press: 01 February 2011
Abstract
To improve short-channel characteristics and increase current drive, SOI technology is shifting focus from “classical” single-gate MOSFET architectures to multiple-gate device structures. This paper traces the history of single- and multiple-gate SOI MOSFETs and summarizes the electrical characteristics of such devices.
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- Copyright © Materials Research Society 2003